好處
- 全刻度范圍從 100 毫托 … 1000 托
- 電源接通后快速穩定
- 暴露于大氣壓后快速恢復
- 防腐陶瓷傳感器
- 的長期信號穩定性
- 溫度補償
- 傳感器防污染雙層保護
- 一鍵調零功能
- 電源范圍廣
- 2 個設定點
- RS232 接口
- Remote zero included
- 符合潔凈室標準
- Status LED
典型應用
- 用于刻蝕、CVD、PVD、ALD 的半導體生產設備
- 數據存儲和顯示制造設備
- 工業真空設備
- 常規高精度壓力測量
規格
類型 | 1000 Torr / 1100 mbar | 500 ... 10 Torr / mbar | 1 Torr / mbar | 0.25 Torr | 0.1 Torr / mbar | |
---|---|---|---|---|---|---|
精度 (1) | % of reading | 0.2 | 0.2 | 0.2 | 0.25 | 0.5 |
溫度效應 | ||||||
零點 | percent FS/°C | 0.005 | 0.005 | 0.015 | 0.02 | 0.02 |
滿量程 | % of reading / °C | 0.01 | 0.01 | 0.01 | 0.03 | 0.03 |
分辨率 | percent FS | 0.003 | 0.003 | 0.003 | 0.003 | 0.003 |
壓力, | kPa (absolute) | 300 | 200 | 200 | 200 | 130 |
反應時間 (2) | ms | ≤100 | ≤100 | ≤100 | ≤100 | ≤100 |
讀數 | percent FS | 0.01 | 0.01 | 0.01 | 0.01 | 0.01 |
建議的讀數 | percent FS | 0.05 | 0.05 | 0.05 | 0.05 | 0.05 |
建議的控制壓力 | percent FS | 0.5 | 0.5 | 0.5 | 0.5 | 0.5 |
溫度 | ||||||
運行(環境) | °C | +5 … +60 | +5 … +60 | +5 … +60 | +5 … +60 | +5 … +60 |
在法蘭處烘烤 (4) | °C | ≤110 | ≤110 | ≤110 | ≤110 | ≤110 |
貯存 | °C | –20 … +65 | –20 … +65 | –20 … +65 | –20 … +65 | –20 … +65 |
電源電壓 | V (dc) | +21 … +27 | +21 … +27 | +21 … +27 | +21 … +27 | +21 … +27 |
76b34a4a-4e29-4c2f-b9f5-f7c162f44101 | ||||||
Signal range | mA | 3.8 ... 20.2 | 3.8 ... 20.2 | 3.8 ... 20.2 | 3.8 ... 20.2 | 3.8 ... 20.2 |
Measuring range (zero ...FS) | mA | 4.0 ... 20.0 | 4.0 ... 20.0 | 4.0 ... 20.0 | 4.0 ... 20.0 | 4.0 ... 20.0 |
Relationship current-pressure | linear | linear | linear | linear | linear | |
Loaded impedance RL | ||||||
33b4d39f-dcb0-4da6-b8bb-405bbe6e5695 | typical 500Ω ±1% 24±3 V (dc) (4) | typical 500Ω ±1% 24±3 V (dc) (4) | typical 500Ω ±1% 24±3 V (dc) (4) | typical 500Ω ±1% 24±3 V (dc) (4) | typical 500Ω ±1% 24±3 V (dc) (4) | |
absolute | 309 ... 657 Ω at 24 V (dc) (4) | 309 ... 657 Ω at 24 V (dc) (4) | 309 ... 657 Ω at 24 V (dc) (4) | 309 ... 657 Ω at 24 V (dc) (4) | 309 ... 657 Ω at 24 V (dc) (4) | |
absolute | 309 ... 657 Ω at 24 V (dc) (4) | 309 ... 657 Ω at 24 V (dc) (4) | 309 ... 657 Ω at 24 V (dc) (4) | 309 ... 657 Ω at 24 V (dc) (4) | 309 ... 657 Ω at 24 V (dc) (4) | |
absolute | 309 ... 657 Ω at 24 V (dc) (4) | 309 ... 657 Ω at 24 V (dc) (4) | 309 ... 657 Ω at 24 V (dc) (4) | 309 ... 657 Ω at 24 V (dc) (4) | 309 ... 657 Ω at 24 V (dc) (4) | |
remote zero input | ||||||
High level | +21 ... +27 V(dc) / ≤8 mA | +21 ... +27 V(dc) / ≤8 mA | +21 ... +27 V(dc) / ≤8 mA | +21 ... +27 V(dc) / ≤8 mA | +21 ... +27 V(dc) / ≤8 mA | |
Low level | V (dc) | ≤2 | ||||
Remote zero function | ||||||
High level (pulse >1s) | auto zero adjust | auto zero adjust | auto zero adjust | auto zero adjust | auto zero adjust | |
Low level | measurement operation | measurement operation | measurement operation | measurement operation | ||
保護等級 | IP 30 | IP 30 | IP 30 | IP 30 | IP 30 | |
標準 | ||||||
CE 合規 | EN 61000?6?2, EN 61000-6-3, EN 61010, 61326-1 & RoHS | EN 61000?6?2, EN 61000-6-3, EN 61010, 61326-1 & RoHS | EN 61000?6?2, EN 61000-6-3, EN 61010, 61326-1 & RoHS | EN 61000?6?2, EN 61000-6-3, EN 61010, 61326-1 & RoHS | EN 61000?6?2, EN 61000-6-3, EN 61010, 61326-1 & RoHS | |
ETL 認證 | UL 61010?1, CSA 22.2 No.61010?1 | UL 61010?1, CSA 22.2 No.61010?1 | UL 61010?1, CSA 22.2 No.61010?1 | UL 61010?1, CSA 22.2 No.61010?1 | UL 61010?1, CSA 22.2 No.61010?1 | |
電氣連接 | D-Sub, 9-pin, male | D-Sub, 9-pin, male | D-Sub, 9-pin, male | D-Sub, 9-pin, male | D-Sub, 9-pin, male | |
Sensor cable | ||||||
Without remote zero | two-wire cable plus shielding, twisted | two-wire cable plus shielding, twisted | two-wire cable plus shielding, twisted | two-wire cable plus shielding, twisted | two-wire cable plus shielding, twisted | |
With remote zero | four-wire cable plus shielding, twisted | four-wire cable plus shielding, twisted | four-wire cable plus shielding, twisted | four-wire cable plus shielding, twisted | four-wire cable plus shielding, twisted | |
暴露于真空的材料 | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) | |
內部容積 | ||||||
內部容積 1/2'' 管 | cm³ (in.³) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) |
內部容積 DN 16 ISO KF | cm³ (in.³) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) |
內部容積 DN 16 CF-R | cm³ (in.³) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) |
內部容積 8 VCR® | cm³ (in.³) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) |
重量 | ||||||
重量 1/2'' 管 | g | 310 | 310 | 310 | 310 | 310 |
重量 DN 16 ISO KF | g | 330 | 330 | 330 | 330 | 330 |
重量 DN 16 CF-R | g | 350 | 350 | 350 | 350 | 350 |
重量 8 VCR® | g | 370 | 370 | 370 | 370 | 370 |
(1) 25 °C 環境溫度時非線性、滯后、可重復,運行 2 小時后不產生溫度效應。
(2) 增加 10 ...90 % FS
(3) 僅適用于壓力控制類型
(4) 非運行
(5) 18% 鉻、10% 鎳、3% 鉬、69% 鐵

數據表
手冊
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三維步驟文件