Colibrys MS9000 inertial accelerometer is a new extra small product designed for harsh environment and safety critical applications. This generation of products comes in a LCC20 （8.9mm x 8.9mm） ceramic package and in a variety of g ranges from ±2g to ±200g. These sensors can operate over extended temperature ranges with? just a few milli g bias stability guaranteed over extended lifetime The main advantages of this motion sensor are the long term bias stability, the low vibration rectification error, the low temperature coefficient even without compensation and the low power consumption. This product has passed extensive qualifications and is successfully incorporated in IMU and AHRS for Mil/Aerospace and Land Navigation applications where reliability and long term compliance to specifications are mandatory requirements. Standard MS9000 products are available with a full-scale range of ±2g, ±10g, ±30g, ±50g, ±100g and now ±200g （Table 1）. Colibrys offers the capability to customize the performance such as shock resistance, vibration rectification error as well as the full-scale range of the products, beyond these standard versions.

Product description

The MS9000 product is a MEMS capacitive accelerometer based on a bulk micro-machined silicon element, a low power ASIC for signal conditioning, a micro-controller for storage of compensation values and a temperature sensor （Fig. 1）.

It operates from a single power supply voltage （between 2.5V and 5.5V） with low current consumption （< 0.5mA at 5V）. The output is ratiometric analog voltage that varies between 0.5V and 4.5V for the full-scale acceleration range at a voltage supply of 5V. The sensor is fully self-contained and packaged in a 20-pin LCC ceramic housing, thus insuring a full hermeticity. It operates over temperature range of –55°C to 125°C and can withstand shocks up to 1000g without performance degradation. Long-term stability of bias and scale factor are typically less than 0.1% of full-scale range. For the ±2g version （MS9002.D）, bias temperature coefficient is typically 100 μg/°C and scale factor temperature coefficient 100 ppm/°C without external compensation

± 30g ± 50g ± 100g ± 200g