高純氣體
氫(H2) Hydrogen
純度Purity≥,% | 雜質含量:Impurities(≤,ppm) | |||||
99.9999 | N2 | O2 | CO | CO2 | THC | H2O |
0.02 | 0.01 | 0.02 | 0.02 | 0.02 | 0.50 | |
99.999 | O2 | THC | H2O | | | |
3.0 | 3.0 | 3.0 | | | |
氮(N2) Nitrogen
純度Purity≥,% | 雜質含量:Impurities(≤,ppm) | |||
99.999 | H2 | O2 | THC+CO+CO2 | H2O |
1.0 | 3.0 | 3.0 | 3.0 |
氬(Ar) Argon
純度Purity≥,% | 雜質含量:Impurities(≤,ppm) | |||
99.999 | H2 | O2 | THC+CO+CO2 | H2O |
1.0 | 2.0 | 2.0 | 4.0 |
氧氣(O2) Oxygen
純度Purity≥,% | 雜質含量:Impurities(≤,ppm) | ||||||
99.999 | H2O | THC | CO | CO2 | Ar | Kr | N2 |
0.50 | 0.20 | 0.50 | 0.50 | 3.00 | 2.00 | 5.00 |
二氧化碳(CO2) Carbon Dioxide
純度Purity≥,% | 雜質含量:Impurities(≤,ppm) | |||
99.999 | O2 | N2 | THC | H2O |
2.0 | 2.0 | 2.0 | | |
99.995 | 20.0 | 5.0 | 1.0 | 4.0 |
99.95 | 40.0 | 10.0 | 1.0 | 10.0 |